Characterization of Silicon Nanoparticles Generated by Nonthermal Silane Plasmas

This project is focused on understanding the optoelectronic properties of silicon nanoparticles produced by nonthermal silane plasmas. In situ FTIRis capable of distinguishing surface hydride coverage of silicon nanoparticles and is a prominent technique used to study the surface chemistry of nanoparticles during exposure to plasma environments. Ex situ photoluminescence,UV-vis, SEM, RBS, XRD, and Raman are used to understand the optical and morphological properties of nanoparticle films. Optical emission spectroscopy and scattering techniques will be used to characterize nanoparticle growth and distribution in the plasma environment. This research will further our understanding of plasma-nanoparticle interactionsand the role of ligands on optoelectronic properties of silicon nanoparticles. ∗email: [email protected]